Waferpedia

Comparison ledger

0035235-003 MMD HeadversusLV100ND

KLA 0035235-003 MMD Head, Nikon LV100ND, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
LV100NDNikon
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadNikon LV100ND
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]—
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Microscope type—Optical microscope[2]
Lighting—Top and bottom lighting using LED white light with adjustable intensity[2]
Objectives—5X, 10X, 20X, 50X, and 100X Plan Fluor high numerical aperture lenses[2]
Brightfield / darkfield—10X Ultra Wide Field brightfield and darkfield for all five lenses[2]
DIC—Selectable Nomarski Differential Interference Contrast for top-down lighting only[2]
Stage—6" x 4" XY stage with glass plate[2]
Condenser—Abbe condenser[2]
Camera—DS-Ri2 Nikon camera, high definition 18 megapixel[2]
Software—Nikon NIS-Elements D Software[2]
Instrument count and locations—Two microscopes in the Flexible Cleanroom and two in the Nanopatterning Cleanroom[2]
Eyepiece—10X Ultra Wide Field[2]
Illumination—Top and bottom lighting using LED white light with adjustable intensity[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]snsf.stanford.edusnsf.stanford.edu