Comparison ledger
KLA 0035235-003 MMD Head, KLA Puma 9120 Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA Puma 9120 |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | User Interface Software Version 9.3.309.2.8[2] |
| Model | 0035235-003[1] | Puma 9120[2] |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| User Interface Software Version | — | 9.3.309.2.8[3] |
| Operating System | — | Windows 2000[3] |
| Load Port Quantity | — | 2[3] |
| Wavelength Illumination | — | 370~720 nm[3] |
| Wavelength Band | — | Visible, UV[3] |
| Pixel Sizes | — | 0.16μm, 0.20μm, 0.25μm, 0.39μm, 0.62μm[3] |
| Array Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[3] |
| Array False Defect Rate | — | ≤1.5% (all sizes)[3] |
| Random Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[3] |
| Random False Defect Rate | — | ≤1.5% (all sizes)[3] |
| Repeatability | — | ≥90% (20 consecutive run on the same DSW wafer)[3] |
| Number of Inspection Pixel Models | — | 3[4] |
| Pixel Sizes (sLXX) Installed or Available | — | sL5, sL8, sL20[4] |
| Cameras | — | 2[4] |
| Loader Type | — | Dual open cassette loader[4] |
| Software Options: Array Mode Algorithm | — | Yes[4] |
| Software Options: Sizing | — | Yes[4] |
| Software Options: 9.1 Simulator | — | Yes[4] |
| Software Options: RICO Capable | — | No[4] |
| Wafer Sizes | — | 200 mm (8 in), 300 mm (12 in)[4] |
| OEM | — | KLA[2] |
| Category | — | Metrology & Inspection[3] |
| Number of Cameras | — | 2[4] |
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