Waferpedia

Comparison ledger

0035235-003 MMD HeadversusArcher AIM+ Overlay

KLA 0035235-003 MMD Head, KLA Archer AIM+ Overlay, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA Archer
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]New / Refurbished Items:[2]
Model0035235-003[1]Archer AIM+[4]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Software version—5.60[2]
New system consumable parts—Shutter, HLS Lamp & Air Filters[2]
Wafer Sizes—8 inch, 12 inch[3]
Handler Options—Dual port 200mm open handler, Dual port 200mm SMIF handler, Dual port 300mm Phoenix Yaskawa handler, Triple port 300mm Phoenix Kawasaki handler[2]
Wafer Size—200mm, 300mm[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing