Waferpedia

Comparison ledger

3 NS 411 B F 006 Atmospheric Wafer Robotversus120 Continuous

Kawasaki 3 NS 411 B F 006 Atmospheric Wafer Robot, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKawasakiLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKawasaki 3 NS 411 B F 006 Atmospheric Wafer RobotLapmaster 120 Continuous
Specifications
ConfigurationAMAT 12" CMP[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing