Comparison ledger
JEOL JEM-7, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | JEM-7JEOL | |
|---|---|---|
| OEM | JEOL | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | 1964 | — |
| Production run | 1964– | — |
| Lifecycle | Legacy | — |
| Lifecycle milestones | 1964 Introduction | — |
| Control system | — | — |
| Generation | — | — |
| Family | JEOL JEM-7 | KLA .204 PSL Wafer |
| Specifications | ||
| Manufacturer | JEOL[1] | — |
| Model | JEM-7[1] | — |
| Type | Electron microscope[1] | — |
| Introduced | 1964[1] | — |
| Notable feature | First electron microscope to include a mechanism for electrical adjustment of the lens axis[1] | — |
| First electronic microscope with electrical lens axis adjustment | Yes[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →