Comparison ledger
Hitachi WA 3300, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WA 3300Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2007 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi WA 3300 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Configuration | Wide Area AFM Main Body[1] | NIST Traceable[3] |
| Type | Atomic Force Microscope[1] | — |
| Wafer size | 300 mm (300 mm Chuck)[1] | — |
| Vintage | 2007[1] | — |
| Optical microscope | Drive (Zoom/Focus) and CCD Camera[1] | — |
| Cantilever modes | Fine Mode, Wide Mode, High Aspect[2] | — |
| Stage | XYZ (3-axis) Stage[1] | — |
| Anti-vibration table | Included[1] | — |
| FOUP transfer unit | Includes FOUP, Transfer Robot, Aligner, Controller, Filter Unit[1] | — |
| Control and data processing | Control Unit, Data Processing PC, CRT Display, Controller[1] | — |
| Description | Wide-area AFM[1] | — |
| Wafer handling | 300 mm Chuck[2] | — |
| AFM sensor | Included[1] | — |
| Camera | CCD camera[1] | — |
| Wafer Size | — | 8 inch[3] |
| NIST Traceable | — | True[3] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[4] |
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