Comparison ledger
Hitachi S 9380, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9380Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9380 | KLA 1.112 PSL Wafer |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Single Phase[2] | NIST Traceable[3] |
| Voltage | 230 V, 50 Hz, 6kVA[2] | — |
| Wafer Size | 12 inch[2] | 8 inch[3] |
| Vintage | 2005[2] | — |
| Frequency | 50 Hz[2] | — |
| Power | 6 kVA[2] | — |
| Type | CD-SEM[1] | — |
| FA-PC Linux Upgrade Available | Yes[1] | — |
| NIST Traceable | — | True[3] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[4] |
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