Comparison ledger
Hitachi S 9360 CD-SEM, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9360 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9360 CD-SEM | KLA 1.112 PSL Wafer |
| Specifications | ||
| Type | Critical Dimension Scanning Electron Microscope (CD-SEM)[1] | — |
| Wafer size | 8, 12 inch[1] | — |
| Vintage | 2012[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| NIST Traceable | — | True[2] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[3] |
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