Comparison ledger
Hitachi S 9300, Thermo Fisher Scientific FEI Quanta 450 FEG, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9300Hitachi | Scientific FEI Quanta 450 FEGThermo Fisher |
|---|---|---|
| OEM | Hitachi | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9300 | Thermo Fisher Scientific FEI Quanta |
| Specifications | ||
| Model | S-9300[2] | Quanta 450 FEG[1] |
| Type | Scanning Electron Microscope (SEM)[2] | — |
| Year of manufacture | 09-1999[3] | — |
| Wafer Size | 200mm & 300mm[3] | — |
| Serial number | 0301-03[3] | — |
| Power requirement | 6kVA Single Phase[3] | — |
| Components | Main unit, Supply unit, Control unit[3] | — |
| Vintage | 1996[2] | 2013[6] |
| Wafer Size (CD SEM specification) | 200mm[4] | — |
| Wafer Imaging | X coverage from 5 – 295mm, Y coverage from 5 – 195mm[4] | — |
| Electron Gun | Schottky emission source[4] | — |
| Accelerating voltage | 500V to 1600V, 10V steps[4] | — |
| Field of view | 1.2mm[4] | — |
| Probe Current | 4~24pA with automated setting and measurement by Faraday cup[4] | — |
| Electromagnetic Lens | 3-Stage Electromagnetic Lens with boosting voltage[4] | — |
| Objective Lens | 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum[4] | — |
| Scan Coil | 2-Stage Electromagnetic Deflection[4] | — |
| Astigmatism correction | via 8-pole electromagnetic coil[4] | — |
| Magnification | 1000x to >300000x[4] | — |
| Field control method | Continuously on for sample decharging at all voltages[4] | — |
| Wafer imaging ability | Entire surface of 8” or 12” wafer[4] | — |
| Depth of focus | ≥ 1.0um at 80000x magnification[4] | — |
| Resolution | 3nm (800V) Retarding/Boosting Mode[4] | — |
| Chemicals Used | Nitrogen, Oil free Air (OFA), PCW Glycol[4] | — |
| Workstation Model | HP B180L (9GB)[4] | — |
| Operating System | Unix version HP-UX 10.20 or newer[4] | — |
| Software Version | 14.71 or newer[4] | — |
| SECS/GEM Communication Interface | Yes[4] | — |
| Dual XY Hitachi Microscale | Yes[4] | — |
| DSP Image Processing | Yes[4] | — |
| BSE Mode | Yes[4] | — |
| Multipoint Measurement Function | Yes[4] | — |
| Edge Roughness Function | Yes[4] | — |
| Automated Image Archiving Function | Yes[4] | — |
| Wafer Handling System | 200mm Wafer Handling System, (2) Cassette holders with ergo flippers, Convertible to 300mm with conversion kit[4] | — |
| Optical Microscope System | Monochrome Image using CCD camera, 110x Magnification[4] | — |
| Equipment type | Scanning Electron Microscope[2] | Scanning electron microscope (SEM)[1] |
| System type | CD-SEM system[5] | — |
| Wafer size | 200mm and 300mm[3] | — |
| Workstation | HP B180L (9GB)[4] | — |
| Control system OS | Unix version HP-UX 10.20 or newer[4] | — |
| Depth of Focus | ≥1.0µm at 80000x magnification[4] | — |
| Wafer Handling | 200mm cassette holders with ergo flippers; convertible to 300mm with conversion kit[4] | — |
| Configuration | — | 50/60 Hz[6] |
| Voltage | — | 230 V[6] |
| Make | — | Thermo Fisher Scientific / FEI[1] |
| Electrical | — | 50/60 Hz - 230 V[6] |
| Included accessory | — | with Caron 2050-4[6] |
| Asset # | — | 155815[1] |
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