Comparison ledger
Hitachi S 9200 CD-SEM, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9200 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9200 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Voltage | 200V[1] | — |
| Frequency | 60 Hz[1] | — |
| Power | 6kVA[1] | — |
| Type | Critical dimension scanning electron microscope (CD-SEM)[1] | — |
| Model | S 9200[1] | — |
| Category | Metrology & Inspection[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer Size | — | 8 inch[3] |
| NIST Traceable | — | True[3] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →