Comparison ledger
Hitachi S 806, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 806Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 806 | KLA .498 PSL Wafer |
| Specifications | ||
| Manufacturer | Hitachi[1] | — |
| Model | S 806[1] | — |
| Tool type | SEM (Scanning Electron Microscope)[1] | — |
| Wafer sizes | 6 inch[1] | — |
| Category | Metrology & Inspection[2] | — |
| Configuration | — | NIST Traceable[3] |
| NIST traceability | — | Yes[3] |
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