Waferpedia

Comparison ledger

S 4800 FE-SEMversus.498 PSL Wafer

Hitachi S 4800 FE-SEM, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
S 4800 FE-SEMHitachi
.498 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 4800KLA .498 PSL Wafer
Specifications
ConfigurationWith EDAX[1]NIST Traceable[3]
Wafer Size12 inch[1]—
Source TypeCold field-emission[2]—
DetectorsSTEM and EDX[2]—
Vintage2005[1]—
NIST traceability—Yes[3]
S 4800 FE-SEM entry.498 PSL Wafer entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.ualberta.cananofab.ualberta.ca
  3. [3]inventory listing