Comparison ledger
Hitachi S 4000, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 4000Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 4000 | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | with Kevex 3600-0615[1] | NIST Traceable[3] |
| Instrument type | Scanning electron microscope (SEM)[1] | — |
| Category | Metrology & Inspection[2] | — |
| Primary function | Examines material surfaces and structural detail at high magnification[2] | — |
| Application area | Semiconductor and related precision-manufacturing work[2] | — |
| Documented configuration | With Kevex 3600-0615[1] | — |
| Wafer Size | — | 8 inch[3] |
| Traceability | — | NIST[4] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[3] |
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