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Comparison ledger

Kokusai DJ 825 V 8 BLversus0332 F 9453 302 Diffusion

Hitachi Kokusai DJ 825 V 8 BL, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMHitachiVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones1996 Vintage—
Control system——
Generation——
FamilyHitachi KokusaiVarian 0332 F 9453 302 Diffusion
Specifications
ConfigurationFurnace Frame[1]—
ManufacturerHitachi Kokusai[2]—
ModelDJ 825 V 8 BL[2]—
CategoryThermal / Diffusion[1]—
Wafer size8 inch[2]—
Vacuum / pumpingLow Pressure Vertical Loadlock Chamber[1]—
Batch sizeBatch of 100wfr (oven size)[1]—
Process materialDoped Poly SI[1]—
Working statusnot working[1]—
Asset Number—142841[3]
Last Confirm Date—October 14, 2025[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]fab-spares.comfab-spares.com