Comparison ledger
Hitachi HF3300, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HF3300Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi HF3300 | KLA 0035235-003 MMD Head |
| Cited variants |
| — |
| Specifications | ||
| Instrument Type | Transmission electron microscope (TEM)[2] | — |
| Instrument Code | TEM-14[2] | — |
| Facility Section | Charge Beam Imaging[2] | — |
| Tool designation | Hitachi HF3300(S) Megascope[2] | — |
| Model | HF3300(S)[3] | 0035235-003[5] |
| Manufacturer | Hitachi[3] | — |
| Instrument type | Transmission electron microscope[4] | — |
| Mode capability | Scanning transmission electron microscopy (STEM)[3] | — |
| Accelerating voltage | 300 kV[3] | — |
| TEM resolution | 0.13 nm[3] | — |
| STEM resolution | 0.1 nm[3] | — |
| Detectors | Annular dark field (ADF) detector and bright field (BF) detector[3] | — |
| EDS | Dual Oxford energy dispersive X-ray spectroscopy detectors[3] | — |
| EELS | Electron energy loss spectroscopy detector[3] | — |
| Microscopy capabilities | High resolution Lorentz microscopy and electron holography[3] | — |
| In-situ heating | Possible with a Norcada heating holder with biasing contacts[3] | — |
| Gas flow injection | Air, O2, H2O vapor, CO2, and H2[3] | — |
| Acceleration voltage | 300 kV[1] | — |
| STEM capability | Capable of scanning transmission electron microscopy (STEM)[1] | — |
| ADF detector | Annular dark field (ADF) detector[1] | — |
| BF detector | Bright field detector (BF)[1] | — |
| EDS detectors | Dual Oxford energy dispersive X-ray spectroscopy (EDS) detectors[1] | — |
| EELS detector | Electron energy loss spectroscopy (EELS) detector[1] | — |
| Lorentz microscopy | High-resolution Lorentz microscopy[1] | — |
| Electron holography | Electron holography capability[1] | — |
| Partial pressure gas flow injection | Possible with air, O2, H2O vapor, CO2 and H[1] | — |
| Configuration | — | TSTD PCB ASSY, MMD MEAS HEAD[5] |
| Make | — | KLA[5] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[5] |
| Compatible System | — | KLA AIT-XP[5] |
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