Comparison ledger
Hitachi 8840 CD-SEM, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8840 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 8840 CD-SEM | KLA 1.112 PSL Wafer |
| Specifications | ||
| OEM | Hitachi[1] | — |
| Model | 8840[1] | — |
| Tool type | Critical Dimension Scanning Electron Microscope (CD-SEM)[1] | — |
| Category | Metrology & Inspection[2] | — |
| Wafer size | 6 inch[1] | — |
| Asset # | 71769[1] | — |
| Last confirm date | June 05, 2023[1] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer Size | — | 8 inch[3] |
| NIST Traceable | — | True[3] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[4] |
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