Waferpedia

Comparison ledger

1305 BSG 3versus96 304 SST

Hitachi 1305 BSG 3, Wafab 96 304 SST, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
OEMHitachiWafab
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
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FamilyHitachi 1305 BSG 3Wafab 96 304 SST

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