Comparison ledger
Hitachi 1305 BSG 3, Tokyo Electron NS 300 + Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | NS 300 + WaferTokyo Electron |
|---|---|---|
| OEM | Hitachi | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Tokyo Electron NS 300 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | 8 chambers[1] |
| Wafer size | — | 8" wafer[1] |
| Phase | — | 1 phase[1] |
| Chemicals | — | TMY[1] |
| FOUP | — | 4[1] |
| Power supply | — | Tel NSPB-E075-Y[1] |
| Process Type | — | Wet process[1] |
| Wafer Size | — | 8 inch[1] |
| Number of Chambers | — | 8[1] |
| FOUP Capacity | — | 4[1] |
| Power Supply Model | — | Tel NSPB-E075-Y[1] |
| Phase (NS 300+) | — | 1 phase[1] |
| Phase (NS 300) | — | 3 phase[3] |
| Frequency (NS 300) | — | 50/60Hz[3] |
| OEM | — | Tokyo Electron[1] |
| Model | — | NS 300 +[1] |
| Tool type | — | Wafer Scrubber[1] |
| Chambers | — | 8 chambers[1] |
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