Comparison ledger
Hitachi 1305 BSG 3, Tokyo Electron Mark 7, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | Mark 7Tokyo Electron |
|---|---|---|
| OEM | Hitachi | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Tokyo Electron Mark |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | 1C2D[2] |
| Wafer size range | — | 5 inch to 8 inch[3] |
| Wafer transport | — | Vacuumless robotic transport[3] |
| Chuck types | — | Mechanical and vacuum chucks for top and back side cleaning[3] |
| Brush control | — | Automatic brush pressure controller[3] |
| Optional cleaning | — | Jet or megasonic cleaning[3] |
| Host communication | — | GEM host communication[3] |
| Interface | — | SMIF interface[3] |
| Compliance | — | S2-93 and CE mark[3] |
| Vintage | — | 2011 |
| Coaters & Developers Vintage | — | 2011 |
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