Comparison ledger
Hitachi 1305 BSG 3, Tokyo Electron Clean Track Act 12, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | Clean Track Act 12Tokyo Electron |
|---|---|---|
| OEM | Hitachi | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Tokyo Electron Clean Track |
| Cited variants | — | |
| Specifications | ||
| Configuration | — | Single Block[2] |
| Block configuration | — | Single Block[2] |
| Coating units | — | 2[2] |
| Developing units | — | 2[2] |
| Air supply accessory (variants) | — | Shinwa ESA CFCP-8-00; Shinwa T&H ESA-8-F-02[2] |
| Power box model | — | PB121-I150-YA-L1T, 200-200V/3ph/50~60Hz[3] |
| Solvent distribution station | — | 2-Door Stainless Steel[3] |
| Recirculating temperature controller | — | SMC Thermo-Con Model INR-244-265A-3004-X17, 200V/3ph/60Hz; PolyScience DuraChill Model DCA304D1, 200-230V/3ph/50-60Hz[3] |
| Air supply system | — | Shinwa Model T&H-ESA-2S-T-01, 200-230V/3ph/50-60Hz[3] |
| Equipment type | — | Coater / Developer[2] |
| OEM | — | Tokyo Electron[1] |
| Model | — | Clean Track Act 12[2] |
| Developers | — | 2[2] |
| Associated air supply system | — | Shinwa T&H ESA-8-F-02 Temperature and Humidity Controlled Air Supply System[2] |
| Associated temperature and humidity controlled air supply system | — | Shinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System[3] |
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