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1305 BSG 3versusWS 820 L Single Wafer

Hitachi 1305 BSG 3, SCREEN WS 820 L Single Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
WS 820 L Single WaferSCREEN
OEMHitachiSCREEN
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3SCREEN WS 820 L Single Wafer
Specifications
Wafer size—200 mm[1]
Transfer type—Carrierless[1]
Maximum processing baths—13[1]
Maximum transfer robots—6[1]
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Sources (1)Every fact above is drawn from these public sources
  1. [1]screen.co.jpscreen.co.jp