Comparison ledger
Hitachi 1305 BSG 3, SCREEN SU 3200 Single Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SU 3200 Single WaferSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SU 3200 Single Wafer |
| Specifications | ||
| Type | — | single-wafer cleaner[1] |
| Wafer size | — | 12 inch[2] |
| Expandable chambers | — | up to 12 chambers[1] |
| Throughput | — | up to 800 wafers per hour[1] |
| Process compatibility | — | compatible with processes for 28 nm node and lower[3] |
| Make | — | SCREEN / DNS[2] |
| Model | — | SU 3200[2] |
| Tool type | — | Single Wafer Cleaner[1] |
| Maximum throughput | — | up to 800 wafers per hour[1] |
| Maximum chambers | — | up to 12 chambers[1] |
| Chamber arrangement | — | 12 chambers in four three-level towers[1] |
| Chemical supply system | — | dynamic direct injection (DDI) or cabinet-type chemical supply system[1] |
| Communication protocol | — | SECS/GEMS[4] |
| Wafer handler | — | Kawasaki robot[4] |
| System power rating | — | 208AC-3 Phase[4] |
| Software version | — | P2485STD00V2485STD00[4] |
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