Waferpedia

Comparison ledger

1305 BSG 3versus80 A Wafer

Hitachi 1305 BSG 3, SCREEN 80 A Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
OEMHitachiSCREEN
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
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FamilyHitachi 1305 BSG 3SCREEN SK 80
Specifications
Configuration—Two front high pressure flushing function[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing