Waferpedia

Comparison ledger

PCO 520versus0332 F 9453 302 Diffusion

Heller PCO 520, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PCO 520Heller
OEMHellerVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller PCO 520Varian 0332 F 9453 302 Diffusion
Specifications
Phase3 Phase[1]—
Largest Heater Load20.7 A[1]—
Short Circuit Interrupting Capacity10K A[1]—
Equipment typePressure curing oven[2]—
MakeHeller[1]—
ModelPCO 520[1]—
Voltage208-220 V[1]—
Current102 A[1]—
Frequency50-60 Hz[1]—
Typical process time120 min or per user spec[2]—
Operating temperature60°C – 200°C[2]—
Max temperature220°C[2]—
Operating pressure1 – 10 bar[2]—
Capacity24 magazines (typical)[2]—
Cooling methodPCW (17°C – 23°C)[2]—
Cooling water pressure25 – 40 psi[2]—
Oven size2,200[L] x 1,700[W] x 1,700[H] mm[2]—
Chamber usable area716.5[L] x 608[W] x 440[H] mm[2]—
Max operating pressure10 bar (145 psi)[2]—
Max operating temperature200°C[2]—
Loading typeManual loading[2]—
Asset Number—142841[3]
Last Confirm Date—October 14, 2025[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]sinerji-grup.comsinerji-grup.com
  3. [3]Equipment inventory listing
  4. [4]fab-spares.comfab-spares.com