Waferpedia

Comparison ledger

1810 MK 5versus1810 MK III IR

Heller 1810 MK 5, Heller 1810 MK III IR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1810 MK 5Heller
OEMHellerHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1810Heller 1810
Specifications
ConfigurationLow Hours, Edge Rails, Mesh Belt, Right to Left[1]18” On Load Conveyor and 18” Off Load Conveyor[2]
Temperature—20 Independent Temperature Controlled 350°C IR Heating Zones[2]
Voltage—480V, 50/60 HZ, 3 phase, 100 AMPS per phase · Left to Right Conveyor Travel[2]
Floor space requirements—183"L x 54"W x 63"H[2]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing