Waferpedia

Comparison ledger

3828-46versus12 Lapper

GigaMat 3828-46, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3828-46GigaMat
12 LapperLapmaster
OEMGigaMatLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGigaMat 3828-46—
Specifications
Outside plate diameter—12 inches[1]
Lapping Speed Range—0 to 60 rpm[2]
Wafer Size Compatibility—4 inches or smaller[1]
Input Voltage—110 V[1]
Frequency—60 Hz[1]
Phase—1[1]
Number of Rings—3[1]
Number of Weights—3[1]
Includes Slurry System—Yes[1]
Includes Timer—Yes[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]jmind.comjmind.com
  2. [2]etd.ohiolink.eduetd.ohiolink.edu