Waferpedia

Comparison ledger

3806 Lversus100R16

GigaMat 3806 L, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3806 LGigaMat
100R16Strasbaugh
OEMGigaMatStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGigaMat 3806 LStrasbaugh 100R16
Specifications
ConfigurationWith Water Jet[1]—
Voltage480 VAC[1]—
Frequency60 Hz[1]—
type—1 spindle grinder/polisher[2]
drive system—DC drive system with 2 motors[2]
spindle RPM—1-180 RPM[2]
eccentric RPM—1-90 RPM[2]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[2]
capacity—16 inches[2]
spindle size—1-8 TPI[2]
overall dimensions—28 inches x 36 inches x 48 inches[2]
weight—500 lbs[2]
origin—made in the USA[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]excelltechnology.comexcelltechnology.com