Comparison ledger
Exatron 902, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 902Exatron | 1007KLA |
|---|---|---|
| OEM | Exatron | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Exatron 902 | KLA 1007 |
| Cited variants | — | |
| Specifications | ||
| Device size range (Random Sort) | 0.5mm x 0.5mm – 2.0mm x 2.0mm[1] | — |
| X-Y Axis Resolution | 0.1mm (0.003")[1] | — |
| X-Y Axis Max. Velocity | 122cm/s (48"/s)[1] | — |
| Z Axis Resolution | ±0.1mm (0.003")[1] | — |
| Z Axis Repeatability | ±0.1mm (0.003")[1] | — |
| Placement Force | Up to 10kg (20lbs) force with standard pickup heads[1] | — |
| Theta Axis Resolution | 0.1°[1] | — |
| Theta Axis Repeatability | ±0.1mm (0.003")[1] | — |
| Power | 100-240VAC 50/60Hz @ 240 Watts[1] | — |
| Air | 5.9 bar (85 PSI) @ 3 CFM clean, dry air[1] | — |
| Operational Temp. | 13-32°C (55-90°F)[1] | — |
| Humidity | 35-90% RH non-condensing[1] | — |
| Manufacturer | — | KLA[3] |
| Model | — | 1007[3] |
| Description | — | Wafer Prober[3] |
| Wafer size | — | 150 mm[3] |
| Convertible to 8 inch wafer size | — | Yes[3] |
| Vintage | — | 01.06.1995[3] |
| Make | — | KLA[4] |
| Equipment type | — | Prober[4] |
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