Comparison ledger
EV Group 620 Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 620 MaskEV Group | 1000 FamilyUltratech |
|---|---|---|
| OEM | EV Group | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | 3 Station Wafer Handler | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 620 | Ultratech 1000 Family |
| Specifications | ||
| Voltage | 200 V[1] | — |
| Phase | 2 Phase[1] | — |
| Configuration | 50 / 60 Hz[1] | — |
| Current Rating | 10 A[1] | — |
| Interrupting Capability | 50 kiloamps[1] | — |
| Overcurrent Protection | Provided at machine terminals[1] | — |
| Frequency | 50/60 Hz[2] | — |
| Power consumption | 1.55 kW[2] | — |
| Full load current rating | 7.45 A[2] | — |
| Largest current rating | 7.45 A[2] | — |
| Breaker size / AIC | 10 A / 10 kA[2] | — |
| Compressed Air (CDA) | 6 bar / 87 psi[2] | — |
| Nitrogen or CDA | 6 bar / 87 psi[2] | — |
| Vacuum | < 850 mbar / 6460 torr[2] | — |
| Wafer Sizes | 2, 3, 4, 5, 6, 12 inch[2] | — |
| Backside Alignment | Capable[3] | — |
| Infrared Alignment | Capable[3] | — |
| Chuck Size | 5 inch to 6 inch[3] | — |
| OEM | EV Group[1] | — |
| Model | 620 Mask[1] | — |
| Equipment type | Mask Aligner[1] | — |
| Category | Lithography[1] | — |
| Wafer size | 4 inch[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[5] |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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