Comparison ledger
ERSA Hotflow 3 20, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Hotflow 3 20ERSA | |
|---|---|---|
| OEM | ERSA | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ERSA Hotflow 3 20 | Varian 0332 F 9453 302 Diffusion |
| Cited variants | — | |
| Specifications | ||
| Heating zones (basic) | 7 top-side preheating zones, 3 top and bottom-side peak zones[1] | — |
| Cooling zones | 4-stage version with water recooling (basic: 1 stage)[3] | — |
| Conveyor working width | 45 – 580 mm[3] | — |
| Conveyor speed | 20 – 200 cm/min[3] | — |
| Process length | 5,190 mm[3] | — |
| Heated length | 3,700 mm[3] | — |
| Cooling length | 1,490 mm[3] | — |
| Dimensions (L x W x H) | 6,590 mm x 1,530 mm x 1,450 mm[3] | — |
| Weight (incl. options) | approx. 3,200 kg[3] | — |
| Nominal rating | 65 kW – 104 kW (subject to configuration)[3] | — |
| Continuous rating for operation | approx. 12 – 19 kW[3] | — |
| Electrical supply | 3 x 400 V, N, PE, 50/60 Hz, max fuse 3 x 100 A[3] | — |
| Exhaust volume per stack | 400 m³/h, 2 stacks[3] | — |
| Noise level (permanent) | < 70 dB (A)[3] | — |
| Board clearance (standard) | +25/-37 mm[3] | — |
| Board clearance (option) | +35/-37 mm[3] | — |
| Conveyor height from floor | 820 – 980 mm[3] | — |
| Working width (conveyor) | 45 – 580 mm[3] | — |
| Heating length | 3,700 mm[3] | — |
| Number of preheating zones | 7 top-side[1] | — |
| Number of peak zones | 3 top and bottom-side[1] | — |
| Noise level | < 70 dB (A)[3] | — |
| Asset Number | — | 142841[4] |
| Last Confirm Date | — | October 14, 2025[5] |
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