Waferpedia

Comparison ledger

3220versusDFG 8830

Disco 3220, Disco DFG 8830, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DFG
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]—
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Configuration—In-Feed[3]
Phase—3 Phase[3]
Wafer size—6 inch, 8 inch[3]
Material—SiC (silicon carbide)[3]
Max workpiece size—ø150 mm[4]
Spindle quantity—4[4]
Spindle power (Z1–Z3)—6.3 kW[4]
Spindle speed (Z1–Z3)—1,000–4,000 min⁻¹[4]
Work disc quantity—5[4]
Dimensions (W×D×H)—1,400 × 2,500 × 2,000 mm[4]
Weight—≈6,000 kg[4]
Maximum workpiece size—150 mm (6 inch)[4]
Wafer sizes supported—6 inch and 8 inch[3]
Spindle count—4[4]
Spindle speed range—1,000 – 4,000 min⁻¹[4]
Number of work stations—5[4]
Dimensions (W x D x H)—1,400 x 2,500 x 2,000 mm[4]
Material compatibility—SiC[3]
In-feed capability—Yes[3]
Power supply—3 Phase, 3 Wire + Ground, 60 A[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]inventory listing
  4. [4]web.archive.orgweb.archive.org