Waferpedia

Comparison ledger

321versusR07

Disco 321, Disco R07, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
R07Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—up to Φ8”
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Disco R07
Cited variants—
  • R07-SDC600-BB101-75[1]
  • R07-SD400-BB200-75[1]
  • R07-SDC400-BB300-75[1]
  • R07-SDC400-BB500-75[1]
Specifications
OEMDisco[2]—
Model321[2]DAD3241[5]
Equipment typeWafer Dicing Saw[2]—
Facility contextCleanroom Instrumentation[2]—
Application areaNano and Micro Fabrication[2]—
LocationFNT 4.106[2]—
Wafer SizeUp to 6 inches[3]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[4]—
Spindle Power (alternate)1500 Watt spindle[3]—
Non-Contact SetupNon Contact Setup[4]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[4]—
Broken Blade DetectionBroken Blade Detection[4]—
Light TowerIncludes Light Tower[4]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[3]—
Wafer size capabilityUp to 6" wafers[4]—
Chuck6-inch porous film frame chuck[3]—
Spindle power1500-watt spindle[3]1.8 kW[5]
FootprintSmall footprint[3]—
SetupNon-contact setup[4]—
Blade break detectionBroken blade detection[4]—
Other featuresFloppy drive, light tower, blade tools, manuals[4]—
Max. workpiece size—Φ8”[5]
X-/Y-axis cutting range—210 mm[5]
Cutting speed—0.1-800 mm/s[5]
Index positioning accuracy—0.002/210 mm[5]
Z-axis max. stroke—32.2 mm[5]
Moving resolution—0.000002 mm[5]
Repeatability accuracy—0.001 mm[5]
Θ-axis max. rotating angle—320°[5]
Rotation speed range—6,000-60,000 rpm[5]
Type—Resin bond blades[1]
Applications—Glass, quartz, ceramics, etc.[1]
Major uses—Glass (borosilicate glass, non-alkali glass), crystal, ceramics, QFN, metal, quartz, alumina, LTCC, aluminum nitride[1]
Wafer size—up to Φ8”[5]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]disco.co.jpdisco.co.jp
  2. [2]tmi.utexas.edutmi.utexas.edu
  3. [3]jmind.comjmind.com
  4. [4]gtsaz.comgtsaz.com
  5. [5]aggiefab.tamu.eduaggiefab.tamu.edu