Comparison ledger
Denton Vacuum Integrity-29, Denton Vacuum Integrity-36, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Integrity-29Denton Vacuum | Integrity-36Denton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Ophthalmic coating system | Ophthalmic coating system |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | Windows NT |
| Generation | — | — |
| Family | Denton Vacuum Integrity-29 | Denton Vacuum Integrity-36 |
| Specifications | ||
| Vacuum chamber material | 304 stainless steel[1] | 304 stainless steel[2] |
| Vacuum chamber dimensions | 29 in wide x 29 in deep x 32 in high[1] | 36" wide x 36" deep x 42" high[2] |
| Vacuum chamber door | Full-width front door with two-point articulating hinges and Viton O-ring seal[1] | Full-width front door with two-point articulating hinges and Viton O-ring seal[2] |
| System cabinets | Two stand-alone NEMA 12 enclosures[1] | — |
| Pumping system | APD-10SC cryogenic pump with APD Displex water-cooled compressor and Alcatel 2063 two-stage rotary vane mechanical pump[1] | APD Cryogenics Marathon 12 cryogenic pump, APD Displex water-cooled compressor, Edwards E2M175 two-stage rotary vane mechanical pump, and Polycold PFC330ST cryogenic cooler[2] |
| Additional vacuum cooling | Polycold PFC330ST cryogenic cooler[1] | — |
| Vacuum gauging controller | Granville-Phillips GP307 ionization/convectron gauge controller[1] | — |
| Process gas control | Two MKS 2179 mass flow controllers, each capable of 0-100 sccm in fixed flow mode[1] | MKS 2179 mass flow controller, 0-100 SCCM in fixed flow mode[2] |
| Substrate rotation | Direct drive, single rotation fixture with bearing-supported feedthrough and 1.0 in diameter shaft[1] | Standard direct drive single rotation system with 1.0" diameter shaft[2] |
| Substrate heater | One 3 kW radiant quartz heater assembly[1] | — |
| Ion source | Denton Vacuum CC-105 cold cathode ion source[1] | DVI CC-105 cold cathode ion source with Senvac GD20/600 and Sorensen DCS 33-33 power supplies[2] |
| Electron beam evaporation source | TFI-Telemark TFI-261-06 six-pocket rotary crucible electron beam source[1] | — |
| Electron beam power supply | TFI-Telemark ST-4 4.0 kW electron beam gun power supply[1] | — |
| Low voltage resistance source power supply | Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1] | — |
| Deposition controller | Inficon XTC/2 quartz crystal controller with single crystal sensor[1] | Inficon XTC/2 quartz crystal controller with single crystal sensor[2] |
| System computer | Hewlett Packard Vectra PC with 586 microprocessor and 17 in SVGA monitor[1] | — |
| Control software interface | GE Cimplicity software via RS-485 interface to a GE Fanuc 9030 PLC[1] | — |
| Vacuum gauging | — | Two Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[2] |
| Substrate heaters | — | Two 3 kW radiant quartz heater assemblies[2] |
| Electron beam source | — | TFI-Telemark TFI-261-06 six-pocket rotary crucible source with ST-4 4.0 kW power supply[2] |
| Low voltage resistance source | — | Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[2] |
| Control system | — | Gateway computer with 17" SVGA monitor, IEEE-488 and RS-232 interfaces, and GE Fanuc 9030 PLC via RS-485 using GE Cimplicity HMI software[2] |
| Control modes | — | Automatic, Manual, and Service[2] |
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