Comparison ledger
CyberOptics LSM 300, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | LSM 300CyberOptics | |
|---|---|---|
| OEM | CyberOptics | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1991–1997 | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CyberOptics LSM 300 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Manufacturer | CyberOptics[1] | — |
| Model | LSM 300[1] | — |
| Type | Inspection System[1] | — |
| Inspection mode | Off-line[2] | — |
| Measurement approach | Non-contact laser based system[2] | — |
| Height measurement | Automatic height measurements[2] | — |
| Dimensional measurements | X-/Y-measurements[2] | — |
| Additional data | Area and volume data[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer Size | — | 8 inch[3] |
| NIST Traceable | — | True[3] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[4] |
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