Waferpedia

Comparison ledger

1000 Hot Plateversus450PB-HV

CEE 1000 Hot Plate, YES 450PB-HV, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size—up to 450°C
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateYES 450PB-HV
Cited variants—
  • YES-450PB-HV (High Vac)[1]
  • YES-450PB-HV[1]
Specifications
Configuration4"[2]—
TypeHot Plate[2]—
Wafer Size4 inch[2]—
Series—450PB Series[1]
Model—YES-450PB-HV (High Vac)[1]
Vacuum level—high vacuum (10^-6)[1]
Maximum temperature—up to 450°C[1]
Purge—patented nitrogen purge precedes process preparation[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing