Comparison ledger
CEE 1000 Hot Plate, Tokyo Electron Alpha 8 SE Z Oxidation, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 8 SE Z OxidationTokyo Electron | |
|---|---|---|
| OEM | CEE | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2007– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Tokyo Electron Alpha |
| Specifications | ||
| Configuration | 4"[1] | — |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | 8 inch[2] |
| Process | — | SOD Cure[2] |
| Phase | — | 3 Phase[2] |
| Gas | — | N2,P-N2,O2,H2[2] |
| Phases | — | 3 Phase[2] |
| Gases | — | N2, P-N2, O2, H2[2] |
| Vintage | — | 2007[2] |
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