Comparison ledger
CEE 1000 Hot Plate, Mattson AST 2800 SMIF RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AST 2800 SMIF RTPMattson | |
|---|---|---|
| OEM | CEE | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Mattson AST 2800 |
| Specifications | ||
| Configuration | 4"[1] | PRI Robot ATM307[2] |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | — |
| Phase | — | 3 phase[2] |
| Software | — | DOS 2.0[2] |
| CIM | — | GEM[2] |
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