Waferpedia

Comparison ledger

1000 Hot Plateversus1913 MK III Nitrogen

CEE 1000 Hot Plate, Heller 1913 MK III Nitrogen, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateHeller 1913
Specifications
Configuration4"[1]Has 400 Degrees Celsius Max[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing