Waferpedia

Comparison ledger

1000 Hot Plateversus1810 MK III IR

CEE 1000 Hot Plate, Heller 1810 MK III IR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateHeller 1810
Specifications
Configuration4"[1]18” On Load Conveyor and 18” Off Load Conveyor[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Temperature—20 Independent Temperature Controlled 350°C IR Heating Zones[2]
Voltage—480V, 50/60 HZ, 3 phase, 100 AMPS per phase · Left to Right Conveyor Travel[2]
Floor space requirements—183"L x 54"W x 63"H[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing