Comparison ledger
Cascade Microtech Summit 12000, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Summit 12000Cascade Microtech | 1007KLA |
|---|---|---|
| OEM | Cascade Microtech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech Summit 12000 | KLA 1007 |
| Specifications | ||
| Configuration | HP Rack[1] | — |
| Temperature range | –65 °C to +200 °C[2] | — |
| Bridge travel | 8″ × 5″[2] | — |
| Wafer size | 8 inch[3] | 150 mm[4] |
| Manipulator capacity | up to 8 manipulators[2] | — |
| X-Y stage resolution | 0.1 micron[3] | — |
| X-Y stage accuracy | +/- 2 micron[3] | — |
| Chuck type | 200 mm thermal chuck with Temptronic temperature controller[3] | — |
| Microchamber | Attoguard Microchamber[3] | — |
| Microscope | Azoom microscope with single long working distance objective[3] | — |
| Vibration isolation | Vibration isolation table[3] | — |
| Temperature | With Attoguard Microchamber & -65°C to 200°C Shielded Chuck[3] | — |
| Support for manipulators | up to 8[3] | — |
| Thermal chuck | 200 mm, range -65°C to +200°C, with Temptronic temperature controller[3] | — |
| Manufacturer | — | KLA[4] |
| Model | — | 1007[4] |
| Description | — | Wafer Prober[4] |
| Convertible to 8 inch wafer size | — | Yes[4] |
| Vintage | — | 01.06.1995[4] |
| Make | — | KLA[5] |
| Equipment type | — | Prober[5] |
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