Comparison ledger
Canon FPA 3000 i 4 i-Line, EV Group 101, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 3000 i 4 i-LineCanon | 101EV Group |
|---|---|---|
| OEM | Canon | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | EV Group 101 |
| Specifications | ||
| Reticle size | 6"[1] | — |
| Wafer type | Notch[1] | — |
| Auto feed | Left hand[1] | — |
| Chuck type | Pin[1] | — |
| GBR unit | No[1] | — |
| Cassette barcode | No[1] | — |
| Reticle barcode | No[1] | — |
| Track interface/type | Yes, DNS[1] | — |
| Software version | V4.08B.09[1] | — |
| Configuration | Missing parts:[1] | — |
| Date of lens data | 4/3/2020[1] | — |
| IUC Uniformity NA/Sigma mode (54/60) | 9087[1] | — |
| IUC Distribution NA/Sigma mode (54/60) | 1.753[1] | — |
| Wafer Size | 8 inch[2] | — |
| Reticle Size | 6 inch[1] | — |
| Track Interface | Yes, DNS[1] | — |
| Missing Parts | PCBs from D-Rack, Main computer[1] | — |
| Lens Data Date | 4/3/2020[1] | — |
| Vintage | 1994[2] | — |
| OEM | — | EV Group[4] |
| Model | — | 101[4] |
| Equipment name | — | EVG 101 Spray Coater[4] |
| NEMO ID | — | evgspraycoat[4] |
| Training required | — | EVG 101 Training[4] |
| Training duration | — | 1.50 hours[4] |
| Processing technique | — | Resist Spray Coat (manual)[4] |
| Cleanliness | — | "All"[4] |
| Location | — | SNF Paul G Allen L107 Cleanroom[4] |
| Wafer diameter (substrate size) | — | up to 300 mm[5] |
| Available modules | — | Spin coat / OmniSpray® / develop[5] |
| Wafer handling options | — | Bowed / warped / thin wafer handling, edge handling[5] |
| Dispense options | — | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[5] |
| Processing technique (at SNF) | — | Resist Spray Coat (manual)[6] |
| Cleanliness group (at SNF) | — | "All"[4] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →