Comparison ledger
Canon FPA 2500 i 2, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 2500 i 2Canon | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | Canon | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1993 Vintage (6 inch unit) · 1994 Vintage (8 inch unit) | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 2500 | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Missing | chamber, cover[1] | — |
| Manufacturer | Canon[2] | — |
| Model | FPA 2500 i 2[2] | — |
| Type | Stepper[2] | — |
| Wafer Size (6 inch) | 6 inch[2] | — |
| Wafer Size (8 inch) | 8 inch[1] | — |
| Vintage (6 inch unit) | 1993[2] | — |
| Vintage (8 inch unit) | 1994[1] | — |
| OEM | Canon[1] | — |
| Equipment type | Stepper[2] | — |
| Wafer size | 8 inch[1] | — |
| Vintage | 1994[1] | — |
| Serial number | 206106[3] | — |
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