Waferpedia

Comparison ledger

Ecomet 6versus100R16

Buehler Ecomet 6, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Ecomet 6Buehler
100R16Strasbaugh
OEMBuehlerStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Ecomet 6Strasbaugh 100R16
Specifications
TypeVariable speed grinder/polisher[1]—
Chuck diameter8 inches[1]—
Max speed340 rpm[1]—
Water requirementRequired[1]—
Electrical115V 60Hz 15A[1]—
Dimensions (L x W x H)30 x 30 x 16 inches[2]—
Weight160 lb[2]—
type—1 spindle grinder/polisher[3]
drive system—DC drive system with 2 motors[3]
spindle RPM—1-180 RPM[3]
eccentric RPM—1-90 RPM[3]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[3]
capacity—16 inches[3]
spindle size—1-8 TPI[3]
overall dimensions—28 inches x 36 inches x 48 inches[3]
weight—500 lbs[3]
origin—made in the USA[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]yorkscientific.comyorkscientific.com
  2. [2]hgrinc.comhgrinc.com
  3. [3]excelltechnology.comexcelltechnology.com