Waferpedia

Comparison ledger

Dimension 9000 Mversus.498 PSL Wafer

Bruker Dimension 9000 M, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrukerKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker Dimension 9000 MKLA .498 PSL Wafer
Specifications
Equipment TypeAtomic Force Microscope (AFM)[1]—
Wafer Size6 inch[1]—
Vintage1999[1]—
Configuration—NIST Traceable[2]
NIST traceability—Yes[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing