Waferpedia

Comparison ledger

Dimension 8000versus1.112 PSL Wafer

Bruker Dimension 8000, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrukerKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker Dimension 8000KLA 1.112 PSL Wafer
Specifications
MakeBruker / Veeco[1]—
ModelDimension 8000[1]—
Equipment typeAFM (Atomic Force Microscope)[1]—
CategoryMetrology & Inspection[2]—
Configuration—NIST Traceable[3]
Wafer Size—8 inch[3]
NIST Traceable—True[3]
Compatible Tools—Surfscan 6xy0 and Sp1[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com