Comparison ledger
Bruker Dektak 6 M Surface, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Dektak 6 M SurfaceBruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Dektak 6 M Surface | KLA .204 PSL Wafer |
| Specifications | ||
| Instrument type | contact profilometer[1] | — |
| Measurement principle | sensing the deflections of a fine stylus riding over feature steps[1] | — |
| Detectable depth range | 1 mm down to 5 nm[1] | — |
| Maximum step height | 1 mm[1] | — |
| Vertical resolution | 0.1 nm[1] | — |
| Scan length | 50 µm to 30 mm[1] | — |
| Stylus force | 9.8 mN to 147 mN (1 mgf to 15 mgf)[1] | — |
| Maximum wafer diameter | 150 mm (6 in)[1] | — |
| Small pieces supported | Yes[1] | — |
| Maximum thickness | 31 mm[1] | — |
| Stylus tip radius | 12 micrometers[2] | — |
| Point-to-point resolution | 1 angstrom[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer Size | — | 8 inch[3] |
| Traceability | — | NIST[4] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[3] |
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