Comparison ledger
Bruker Dektak 150, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Dektak 150Bruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Dektak | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | for parts[1] | NIST Traceable[3] |
| Scan Length | 55mm (2.16in.)[2] | — |
| Data Points Per Scan | 60,000 maximum[2] | — |
| Step Height Repeatability | 6Å, 1 sigma on 1μm step[2] | — |
| Vertical Resolution | 1Å max. (at 6.55μm range)[2] | — |
| Max Sample Thickness | Up to 100mm (4in.)[2] | — |
| Max Sample Size | 150mm (6in.)[2] | — |
| Stage Travel | 100mm (4 inches)[2] | — |
| Stage Repeatability | 1μm[2] | — |
| Stage Resolution | 0.5μm[2] | — |
| Stylus Radius Options | from 50nm to 25μm[2] | — |
| Camera | 640 x 480-pixel, manual zoom variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)[2] | — |
| Maximum scan length | 55mm (2.16in.)[2] | — |
| Maximum data points per scan | 60,000[2] | — |
| Maximum sample thickness | Up to 100mm (4in.)[2] | — |
| Maximum sample size | 150mm (6in.)[2] | — |
| Y automatic stage travel | 100mm (4 inches), 1μm repeatability, 0.5μm resolution[2] | — |
| Film thickness measurement range | up to 1000μm[2] | — |
| Wafer Size | — | 8 inch[3] |
| Traceability | — | NIST[4] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[3] |
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