Waferpedia

Comparison ledger

DAFPversus0035235-003 MMD Head

Bruker DAFP, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
DAFPBruker
OEMBrukerKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker DAFPKLA 0035235-003 MMD Head
Specifications
OEMBruker[1]—
ModelDAFP[2]0035235-003[4]
Product typeAFM Probe (Atomic Force Microscope)[2]—
CategoryMetrology & Inspection[1]—
Probe categoryDAFP Depth - Automated AFM[3]—
Spring constant15-50 N/m[3]—
Resonant frequency201-400 kHz[3]—
Cantilever geometryRectangular[3]—
Number of cantilevers1[3]—
Configuration—TSTD PCB ASSY, MMD MEAS HEAD[4]
Make—KLA[4]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[4]
Compatible System—KLA AIT-XP[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]brukerafmprobes.combrukerafmprobes.com
  4. [4]inventory listing