Comparison ledger
Bruker D 8 Fabline, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D 8 FablineBruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer chuck and standard sample holder | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker D 8 Fabline | KLA .204 PSL Wafer |
| Specifications | ||
| Handler System | Automation software PTO from Peer Group[1] | — |
| Configuration | Pattern recognition software[1] | NIST Traceable[2] |
| Software Version | 77-2.3A-6A-5A-5A-R6A[1] | — |
| Scanning range of two theta | min. 28° – max. 99°, Omega is limited to min. 30° max. 80° to avoid collision with 300mm wafer chuck[1] | — |
| Wafer size | Wafer chuck and standard sample holder[1] | — |
| X-ray source | TXS point focus (50kV 50mA) generator installed in the electronic cabinet behind the tool[1] | — |
| Two theta scanning range | 28° – 99°[1] | — |
| Omega range | 30° – 80°[1] | — |
| Detector | LynxEye XE[1] | — |
| Stage | Multi-sample holder with wafer chuck for 300mm wafers and standard Bruker sample holder[1] | — |
| Slits | Motorized slits and fixed slit 2mm primary side[1] | — |
| Automation | Fully automated with automation software PTO from Peer Group[1] | — |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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