Comparison ledger
Brooks 017-0146-01 Prealigner, OAI 806 MBA Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 806 MBA MaskOAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI 806 MBA Mask |
| Specifications | ||
| Wafer size | — | 4 inch[1] |
| Included chuck sizes | — | 3 inch, 4 inch, 6 inch BSA chucks; 4 inch, 5 inch, 7 inch mask holders[3] |
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